Optimization of the process of obtaining superconducting bilayer films based on niobium nitride and gold for the manufacture of a superconducting single-photon detector

Abstract We have manufactured a number of bilayer structures based on niobium nitride and gold with different deposition parameters for NbN-Au films (Table 1). We measured the characteristics of superconducting niobium nitride films both with the top layer of gold and without gold. On the basis of the measured characteristics of the films, the optimal parameters of the deposition of NbN-Au bilayer films were chosen for the further formation of a superconducting single-photon detector.