0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit

This work introduces a system formed by an integrated circuit (IC) and a micromachined piezoresistive gyroscope, with navigation grade performance. After discussing the specifications in terms of maximum allowed electronic noise, so not to worsen the thermomechanical noise limits, three different front-end topologies are analyzed, and the current-feedback instrumentation amplifier (CFIA) is chosen as the optimal solution in terms of noise and current consumption. After coupling to a gyroscope based on nanogauges, the system demonstrates 200-dps full scale, $0.02~ {\mathrm { ^{\circ}}}/ {\mathrm { \text {h}}}$ stability, and $0.004~ {\mathrm { ^{\circ}}}/\sqrt { {\mathrm { \text {h}}}}$ angle random walk, confirming navigation-grade performance at a current consumption well below 10 mA and an overall power consumption below 40 mW.