High-throughput homogenization of a quasi-Gaussian ultrafast laser beam using a combined refractive beam shaper and spatial light modulator

Efficiently shaping femtosecond, transverse Gaussian laser beams to flat-top beams with flat wavefronts is critical for large-scale material processing and manufacturing. Existing beam shaping devices fall short either in final beam homogeneity or efficiency. We present an approach that uses refractive optics to perform the majority of the beam shaping and then uses a fine-tune device (spatial light modulator) to refine the intensity profile. For the beam that we selected, circularly asymmetric with intensity fluctuations, our method achieved a uniformity of 0.055 within 90% of the beam area at 92% efficiency. The optimization involved an iterative beam shaping process that converged to optimum within 10 iterations.