Formation of highly reliable Cu/low-k interconnects by using CVD Co barrier in dual damascene structures

CVD Co film was investigated as an alternative barrier layer to the conventional PVD TaN\Ta in V1\M2 structure for 32nm node. We improved via filling performance and upstream (V1ƒM2) electromigration (EM) lifetime by more than three times. Excellent step coverage of CVD barrier makes it possible to reduce the thickness of the barrier metal by 30% and to increase the volume of Cu in metal lines. RC delay also reduced with decrease in resistance. Since adhesion at the interface between the barrier-Co and Cu also is strong, migration of Cu atoms is dramatically slowed down. EM in the via is finally deterred due to absence of pre-existing voids, consequently lifetime increases. This CVD Co process is expected to be beneficial for the next technology generation beyond 20nm node.