A Microneedle Array-based Dry ECG Electrode With High Recording Performance for Healthcare Applications

This paper reports a microneedle array (MNA) dry electrode for electrocardiogram (ECG) recordings without skin preparation. By using back side exposure and Through Polymer Via (TPV) technology, for the first time, the SU-8 microneedle arrays are fabricated on parylene C film and bonded with commercial wet electrode cap. The device has minimal invasive and can pierce through the corneum. Compared with conventional wet electrode, the contact impedance of the MNA dry electrode is lower and the signal quality of the MNA dry electrodes is higher both at rest and after motion. Since conducting gels are not required during ECG recording, the dry electrode shows potential application in long-term clinical health monitoring.