Implementación de un sistema de medición de resistividad eléctrica en películas delgadas semiconductoras por el método de Van der Pauw

The electrical resistivity is an intrinsic property independent of the size or shape of a material, which gives us information about how the material behaves at the rate of electric current. For the value of the resistivity of a material, it can be classified as conductor, semiconductor or insulation. In this thesis will be done the study of the electrical resistivity in the semiconductors, the methods of measurement of resistivity, the correction factors that are very important for a more accurate measurement and the details of the implementation of a measurement system of resistivity by the Van der Pauw method. The Van der Pauw method can be used to measure the resistivity of materials in the form of thin films regardless of the shape of the material. It consists of flowing a constant current through two points at the periphery and measuring the voltage at two other points. With the data obtained the Van der Pauw equation is solved and the resistivity is obtained. Finally, we present the results of the resistivity measurements for square samples of high doping silicon, and also a study of the results obtained when the measurement is made in contacts on the surface area of the sample, failing to use contacts in the periphery, and the effects that this entails.