Study of the Calibration Technique on the SF_6 Gas Leakage Imager

In order to check the sensitivity of the SF6gas leakage imager,this paper used the test method of helium mass spectrometry leak detector for reference,and developed a set of pressure leaks with different leakage rates and a gas supply system for the pressure leaks.Besides,a leak calibration system was trial-produced to calibrate the leakage rate of the standard leak,and experimental research was also conducted on the influencing factors(temperature,pressure)on the leakage rate of the leak.Finally,a preliminary verification was conducted on the SF6gas leakage imager(FLIR).