Design of a MZI Micro-Opto-Mechanical Pressure Sensor for a SiN photonics platform

This paper presents the design of Micro-Opto-Mechanical Pressure Sensors (MOMPS), which can exhibit much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. As the output intensity variation depends on multiple design parameters, such as the radius of the membrane, the position of the waveguide, the wavelength and the phase variation due to the opto-mechanical coupling, we first derive an analytical model which allows to predict the response of the total system. We then use a Finite Element opto-mechanical model to evaluate the variation of the effective refractive index due to the modification of the optical material properties created by mechanical stress as well as to the waveguide shape deformation. Finally, the sensitivity of the device for a single loop MOMPS and for spiral loops configuration is analyzed.