材料科学
灵敏度(控制系统)
电容感应
光子学
波导管
有限元法
光学
折射率
联轴节(管道)
干涉测量
光电子学
声学
电子工程
物理
计算机科学
工程类
结构工程
操作系统
冶金
作者
Véronique Rochus,Roelof Jansen,Jeroen Goyvaerts,G. Vandenboch,Bob Van de Voort,Pieter Neutens,James O Callaghan,H.A.C. Tilmans,Xavier Rottenberg
标识
DOI:10.1109/eurosime.2016.7463357
摘要
This paper presents the design of Micro-Opto-Mechanical Pressure Sensors (MOMPS), which can exhibit much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. As the output intensity variation depends on multiple design parameters, such as the radius of the membrane, the position of the waveguide, the wavelength and the phase variation due to the opto-mechanical coupling, we first derive an analytical model which allows to predict the response of the total system. We then use a Finite Element opto-mechanical model to evaluate the variation of the effective refractive index due to the modification of the optical material properties created by mechanical stress as well as to the waveguide shape deformation. Finally, the sensitivity of the device for a single loop MOMPS and for spiral loops configuration is analyzed.
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