Micro electrohydrodynamic pump driven by traveling electric fields

A novel driving theory on the induction type electrohydrodynamic (EHD) pump driven by traveling electric fields without the temperature gradient is proposed. The micro EHD pump is fabricated by micromaching technology and experimented. We derive the equations of the generating pressure and the flow rate, and discuss the theoretical and the experimental results. The experimental results are consistent with the results of the proposed theory in this paper.