Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve

Abstract Non-contact dispensing is becoming the most widely used dispensing method in the microelectronics manufacturing industry. Achieving micro-volume, stable, and highly uniform droplet jetting is a key research direction for non-contact dispensing. This study designed a two-stage displacement-amplified piezoelectric jet dispensing valve driven by a single piezoelectric stack. The structure features strong reliability and stable jetting performance, and it realizes the functions of easily replacing vulnerable parts and mechanically adjusting the droplet size through special design. First, a mathematical relationship between the output displacement of the displacement amplification mechanism and structural parameters was established, followed by simulation modeling of its displacement travel, stress and strain. To verify the simulation results, experimental study was conducted. The jetting performance of the jet dispensing valve was tested by utilizing a self-made experimental platform. The results showed that the glue point mass remains within the range of 0.399–0.425 mg and is distributed around the mean value 0.412 mg, with a uniformity deviation of 6.31% for the single dispensing amount. The experimental results proved that the jet valve has good jetting stability and also proved the rationality of its structural design, which provided a reference for the subsequent development and application of dispensing technology.