相位噪声
功率消耗
振荡器相位噪声
微电子机械系统
噪音(视频)
压电
声学
锁相环
电气工程
电子工程
功率(物理)
材料科学
计算机科学
物理
光电子学
工程类
噪声系数
CMOS芯片
放大器
量子力学
人工智能
图像(数学)
作者
Pei-Hsuan Lo,Wei Lin,Sheng-Shian Li
标识
DOI:10.1109/iedm45741.2023.10413862
摘要
This work reports a complete demonstration of chip-level low phase noise and low power MEMS oscillator design in 17.55 MHz using a thin-film piezoelectric on silicon (TPoS) technology together with TSMC 0.18 μm CMOS technology node. In such an oscillator design, a four-resonator coupled array with equivalent motional resistance similar to quartz and a self-biased cross-coupled pair are implemented. As a result, a record-low phase noise of piezoelectric MEMS oscillator is measured with -136 dBc/Hz at 1 kHz offset under 154 μW DC power consumption in air while -137 dBc/Hz at 1 kHz offset under 148 μW in vacuum. As compared to the state-of-the-arts, the phase noise of the proposed oscillator in air is still at least 3 dB lower than that of other works operating in vacuum.
科研通智能强力驱动
Strongly Powered by AbleSci AI