The Fabrication of Microlens Array

In this study, we fabricated the microlens array using very simple and economical method which used Si molds made by bulk etching in HNA and spreaded SU-8 on top of the Si mold. And, we developed fabrication conditions for high fill factor microlens array that is in height and in diameter. This microlens array can be used for imaging system like IR detector or projection display. It is expected that it can improve the characteristics of these devices.