Nanotribological properties and scratch resistance of MoS2 bilayer on a SiO2/Si substrate

Abstract The tribological properties and scratch resistance of MoS 2 bilayer deposited on SiO 2 /Si substrates prepared via chemical vapor deposition are investigated. Friction force microscopy (FFM) is employed to investigate the friction and wear properties of the MoS 2 bilayer at the nanoscale by applying a normal load ranging from 200 to 1,000 nN. Scratch resistance is measured using the scratch mode in FFM based on a linearly increasing load from 100 to 1,000 nN. Kelvin probe force microscopy (KPFM) is performed to locally measure the surface potential in the tested surface to qualitatively measure the wear/removal of MoS 2 layers and identify critical loads associated with the individual failures of the top and bottom layers. The analysis of the contact potential difference values as well as that of KPFM, friction, and height images show that the wear/removal of the top and bottom layers in the MoS 2 bilayer system occurred consecutively. The FFM and KPFM results show that the top MoS 2 layer begins to degrade at the end of the low friction stage, followed by the bottom layer, thereby resulting in a transitional friction stage owing to the direct contact between the diamond tip and SiO 2 substrate. In the stable third stage, the transfer of lubricious MoS 2 debris to the tip apex results in contact between the MoS 2 -transferred tip and SiO 2 . Nanoscratch test results show two ranges of critical loads, which correspond to the sequential removal of the top and bottom layers.