旋转(数学)
干涉测量
线性
重复性
物理
灵敏度(控制系统)
光学
激光器
计算机科学
数学
工程类
电子工程
人工智能
统计
量子力学
作者
Xin Xu,Zongren Dai,Yifan Wang,Mingfang Li,Yidong Tan
标识
DOI:10.36227/techrxiv.14686071
摘要
<div> <p></p><p></p><p>In this paper, a novel optical rotary sensor based on laser self-mixing interferometry is developed for the full-circle rotation measurement. The proposed sensor is convenient to use for it does not need any contact with the target or a cooperative mirror. A prototype is fabricated and tested. The measured results demonstrate a good performance compared with other optical rotary sensors, in terms of the 0.1 μrad resolution, the 2.33×10<sup>-4</sup> linearity and 2 μrad stability over one hour. Additionally, the repeatability error is below 14.66 mrad under 9-group full-circle tests, which exhibits the potential to be instrumentalized reliably. Error analysis and limitation discussion have been also carried out. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of high resolution, non-cooperative target sensing and electromagnetic immunity. Hence, the proposed optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.</p><p></p><p></p></div><p></p><p>In this paper, a novel optical rotary sensor based on laser self-mixing interferometry is developed for the full-circle rotation measurement. The proposed sensor is convenient to use for it does not need any contact with the target or a cooperative mirror. A prototype is fabricated and tested. The measured results demonstrate a good performance compared with other optical rotary sensors, in terms of the 0.1 μrad resolution, the 2.33×10<sup>-4</sup> linearity and 2 μrad stability over one hour. Additionally, the repeatability error is below 14.66 mrad under 9-group full-circle tests, which exhibits the potential to be instrumentalized reliably. Error analysis and limitation discussion have been also carried out. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of high resolution, non-cooperative target sensing and electromagnetic immunity. Hence, the proposed optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.</p><p></p>
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