Investigation Progress Review of Micropump Based on MEMS

Micropump plays a very important role in micro electromechanical systems,promising fine perspective in multi applications.The research on the micropump in the past few years is reviewed.Based on the styles of micropump drivers,the mechanical and non-mechanical micropump are summarized from the aspects of their principles and performances.The indexes have to be paid attention to during the selection of the micropump are introduced,and the application of the micropump in many fields is also discussed.