铌酸锂
材料科学
晶片键合
光子集成电路
光电子学
光子学
薄脆饼
波导管
谐振器
氮化硅
集成电路
硅光子学
硅
作者
Siddhartha Ghosh,Siva Yegnanarayanan,Dave Kharas,Matthew Ricci,Jason J. Plant,P Juodawlkis
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2023-03-08
卷期号:31 (7): 12005-12005
被引量:24
摘要
PIC wafers with high layer transfer yield. This will enable future integration with foundry processing and process design kits (PDKs) for applications such as integrated microwave photonics and quantum photonics.
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