Sensitivity enhancement of nanoparticle localized surface plasmon resonance pressure sensor based on the MoS2 monolayer for ultra-wide range pressure detection

The next generation of optical pressure sensors should be highly sensitive, and have wide-ranging pressure sensing detection. The monolayer MoS2 has been considered as an excellent material with exceptional mechanical, physical, electronic and chemical properties, which is significantly different from the properties of graphene. In this paper, the properties of the MoS2 monolayer according to the placement of silver nanoparticles on the surface have been used to design a pressure sensor that can act based on localized surface plasmon resonance. The MoS2 monolayer sensitivity to stress and variations the properties in proportion to the applied pressure, increases the possibility of using it as a pressure sensor. High pressure range, nanoscale and integration capabilities are important features of this sensor. In this sensor the change in the resonance frequency is proportional to the pressure range which the structure parameters including the shape of the nanoparticles, the material and radius of the nanoparticles, the angle of the incoming light and the presence of the mos2 monolayer by considering and optimizing are provided. For mechanics section calculation, we used the FEM method, and for optical behavior, the FDTD method. Measurable pressure range is less than 1 Gpa with 11 nm/GPa sensitivity for this sensor.