Multi-Channel Flexible Microneedle Electrode Array(MNEA) for High-Density Surface EMG Recording

This paper proposed a flexible 32-channel microneedle electrode array (MNEA) based on polyimide (PI) substrate. The MNEA was fabricated by a low-cost micro-molding process without the complex lithography or etching steps. Through the micro-pillar structure of the PDMS negative mold, a through-hole structure was formed during the molding process, thereby realizing double-layer wiring. The pitch of the microneedle electrodes was 800 µm and the conductive polymer PEDOT: PSS was modified on the electrode, which significantly reduced the impedance. The MNEA and the flexible PCB (FPCB) were integrated to realize the recording and wireless transmission of high-density surface Electromyography (HDsEMG) signals.