材料科学
电极
聚酰亚胺
图层(电子)
光电子学
佩多:嘘
基质(水族馆)
造型(装饰)
蚀刻(微加工)
柔性电子器件
平版印刷术
微电子机械系统
导电体
电子工程
作者
Zhongyan Wang,Junshi Li,Bocheng Yu,Dong Huang,Zhihong Li
标识
DOI:10.1109/mems51670.2022.9699517
摘要
This paper proposed a flexible 32-channel microneedle electrode array (MNEA) based on polyimide (PI) substrate. The MNEA was fabricated by a low-cost micro-molding process without the complex lithography or etching steps. Through the micro-pillar structure of the PDMS negative mold, a through-hole structure was formed during the molding process, thereby realizing double-layer wiring. The pitch of the microneedle electrodes was 800 µm and the conductive polymer PEDOT: PSS was modified on the electrode, which significantly reduced the impedance. The MNEA and the flexible PCB (FPCB) were integrated to realize the recording and wireless transmission of high-density surface Electromyography (HDsEMG) signals.
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