9‐1: Invited Paper: Metal‐oxide readout electronics based on Indium‐Gallium‐Zinc‐Oxide and Indium‐Tin‐Zinc‐Oxide for in‐panel fingerprint detection application

This work describes integrated readout electronics for on‐panel fingerprint detection, focusing on two key building blocks: charge sense amplifier (CSA) and analog‐to‐digital converter (ADC). The CSA has been realized in a dual‐gate self‐aligned IGZO thin‐film transistor (TFT) technology with channel length downsizing to 3µm, enabling 1.3mm bezel size for the peripheral readout electronics and 1fps readout of a 1‐Mpixel 500dpi sensor array. The ADC has been realized in two different transistor technologies, IGZO and Indium‐Tin‐Zinc‐Oxide (ITZO). The ITZO ADC achieves a sampling rate of 1kS/s, which is 7.5x faster compared to the IGZO ADC, due to the larger mobility of ITZO.