Micromachined pressure sensors for electromechanical characterization of carbon nanotubes

Abstract We discuss the use of micromachined membrane‐based pressure sensors to investigate electromechanical properties of single‐walled carbon nanotubes. Among the basic transducer concept and the sensor design we mainly focus on the electromechanical transport through nanotubes. Advanced white light interferometer (WLI) based measurement techniques are used to extract the strain on nanotubes adhering to 100‐nm‐thick alumina (Al 2 O 3 ) membranes. Finally, we present electromechanical measurements on strained single‐walled carbon nanotubes, and the physical nature of the piezoresistive gauge factor in carbon nanotubes and their contrast to classical silicon strain gauges is discussed. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)