Enhanced Performance of Fabry–Perot Tunable Filter by Groove Geometry Design of Double Folded Cantilever

Different grooves ( v -shaped groove, trapezoidal groove and rectangular groove) are introduced into the traditional double-folded cantilever of Fabry–Perot Tunable Filter (FPTF) for the optical sensor. Using finite element simulation, the influence of groove geometry on the voltage–displacement relationship, stress distribution and reflector flatness of the FPTF are studied. The results show that the reflector supported by double folded cantilever with rectangular groove has a maximal displacement of 0.88 μ m under 8 V driving voltage, which is 95% higher than double folded cantilever without groove. At 0.5 μ m, the best flatness (warping angle of reflector) is only 0.0032° for reflector supported by double folded cantilever with rectangular groove, where the generated maximal stress in the double folded cantilever is 8.49 MPa. Compared with other double folded cantilevers with v -shaped groove, trapezoidal groove and without groove, the unique properties of double folded cantilever with rectangular groove are attributed to lower elastic modulus. The double folded cantilever with rectangular groove enlarges displacement results in wide range of bandpass wavelength of FPTF, and a best flatness to enhance the monochrome of bandpass wavelength.