Circularly Polarized Light Detection Through 3D Chiral Metasurface‐Based Phototransistors

Abstract Distinguishing between different handedness of circularly polarized light can be a useful additional property in photodetector technology. The integration of this functionality can be obtained either using optical media with chiro‐optical response, or by the employment of chiral metamaterials. In this work, 3D chiral metasurfaces composed by a 3D helix array, are integrated onto a micrometer‐scale silicon‐based transistor and act as optical filter for circularly polarized light. The technological process involving focused electron beam induced deposition for helix manufacturing is carefully studied with respect to its effect on the phototransistor response. The integrated system exhibits a photoresponse which is dependent on the circular polarization, with a promising asymmetry factor in the visible spectral range. The proposed technology can pave the way for novel potential applications in diverse areas such as materials science, bioimaging, and quantum computing.