Expanding the Scope of Mo(III) Precursor Molecules for Vapor Phase Growth of Mo‐Based Materials: Mo(III) Guanidinate

Abstract The synthesis and characterization of tris(N,N’‐di‐isopropyl‐2‐dimethylamido‐guanidinate)molybdenum(III), Mo(iPr‐GND) 3 is reported. This complex expands the known scope of tris(guanidinate)M(III) complexes to include Mo, and adds to the very limited knowledge of homoleptic mononuclear Mo(III) coordination complexes. Volatility of Mo(iPr‐GND) 3 is demonstrated via thermogravimetric analysis (TGA), hinting at potential applications as a molecular precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD). Proof of concept aerosol‐assisted CVD growth with Mo(iPr‐GND) 3 as a single‐source precursor yielded MoC x N y films. The results indicate a potential utility for Mo(iPr‐GND) 3 as a volatile precursor for ALD and CVD, with prospective use as a single‐source precursor for growth of molybdenum nitrides and carbonitrides.