Effect of CH4 Flow Rate on the Tribological Behaviors of TiCN Films against Si3N4 Ceramic and Steel Ball

Control of the structural, mechanical and tribological properties of TiCN films play an important role in its numerous applications, including the cutting tools, mechanical components, aeronautical and biomedical engineering industries. Direct-current magnetron sputtering (DCMS) system was applied to deposit TiCN films onto n-type silicon (100) at room temperature. The Ti-TiN interlayer was used to enhance the adhesive strength between the coating and the substrate. The composition and microstructure of the TiCN films were studied using X-ray photoelectron spectroscopy (XPS) and field-emitted scanning electron microscopy (FESEM). The mechanical properties of the films as a function of methane (CH4) flow ratio were then characterized using nano-indentation measurements. The tribological behavior of TiCN films was investigated by UMT-2MT tribometer against a Si3N4 ceramic and AISI52100 steel ball. After the tribological tests, the wear rate of the films was obtained by the 3D surface profiler and the component content of wear debris was evaluated by energy dispersive X-ray spectroscopy (EDS). The results show that the tribological properties of TiCN films are a function of CH4 flow rates. The film obtained at a 10 sccm CH4 flow rate possesses a minimum average COF value of 0.1964 and reaches 72,000 cycles against a Si3N4 ball over the test duration. Furthermore, the wear rate was only 2.076 × 10−6 mm3/N·m. Furthermore, the TiCN films exhibited longer lifespan against the Si3N4 ball than against the steel ball under the normal load of 1 N, indicating that the TiCN films present better lubricative properties when against low-hardness counterparts than high-hardness counterparts.