光学
薄膜
准直光
光学涂层
反射计
材料科学
X射线光学
涂层
溅射沉积
防反射涂料
光电子学
沉积(地质)
反射(计算机编程)
X射线望远镜
溅射
物理
望远镜
X射线
纳米技术
激光器
计算机科学
沉积物
程序设计语言
计算机视觉
古生物学
时域
生物
作者
Nis C. Gellert,Sonny Massahi,Bianca Salmaso,Daniele Spiga,Desirée Della Monica Ferreira,G. Vecchi,Ivo Ferreira,Marcos Bavdaz,Stefano Basso,Sara Svendsen,Arne S. Jegers,Finn E. Christensen
标识
DOI:10.1117/1.jatis.9.2.024004
摘要
Long mirrors coated with thin films are used for a wide range of applications, e.g., focusing or collimating high-energy optics. Focusing of incident x-ray radiation is one of the major applications for high-energy astronomical telescopes, and collimation of divergent x-ray sources is used for experimental setups to confine or expand x-ray radiation. Both applications utilize grazing angle reflection, which is typically enhanced using x-ray reflective thin films. One of the challenges with thin film coatings is the deposition induced nonuniformities. For x-ray reflecting mirrors, nonuniformity in the thin film deposition influences the thickness, roughness, and density of the thin film, which affects the predicted performance of the mirror. As part of the thin film coating development for the 456-mm-long parabolic mirror used in the Beam Expander Testing X-ray facility, our work presents the challenge of coating long x-ray reflective mirrors. We used x-ray reflectometry to investigate the nonuniformity in platinum and chromium thin films deposited using direct current magnetron sputtering.
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