哑铃
材料科学
纳米压印光刻
制作
平版印刷术
谐振器
蚀刻(微加工)
光刻
纳米技术
超材料
光电子学
微加工
共振(粒子物理)
相(物质)
光学
波导管
光学材料
纳米光刻
调制(音乐)
干法蚀刻
相位调制
纳米结构
反应离子刻蚀
折射率
电子束光刻
纳米光子学
过程(计算)
光开关
软光刻
导模共振
作者
Vin‐Cent Su,Cyun‐Yu Lin,Meng‐Hsin Chen,Jie Yang,Yu-Sheng Tung,Wei‐Hsiang Wang,Kuang-Ling Wei,Cheng‐Yu Lin,Chih‐Kuo Huang,Jian-Wei Lue
摘要
ABSTRACT The development of optical metasurfaces has primarily focused on nanoresonators with sufficiently refractive indices, often requiring high‐aspect‐ratio structures or complex geometries to achieve full phase modulation under phase‐design principles. While nanoimprint lithography has attracted considerable attention for its high throughput and large‐area fabrication capability, conventional approaches typically rely on pattern transfer into hard masks followed by dry etching to realize high‐aspect‐ratio nanoresonators. Here, we introduce a newly developed dumbbell resonance that enables a direct nanoimprinting strategy for fabricating optical metasurfaces composed of resin‐based resonators (n ≈ 1.9) with a structural height of only 250 nm, thereby eliminating the need for high‐aspect‐ratio geometries or additional etching steps. Leveraging this concept, we realize complex vortex‐structured light, vivid structural colors, and diffraction‐limited flat lenses for imaging. These results establish dumbbell resonances as a versatile platform for low‐cost, large‐area, and multifunctional metasurfaces composed of low‐index, small–aspect‐ratio elements.
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