e −-beam deposition of tetragonal ZrO2 films stabilized with alumina and scandia

A new method is presented of producing stabilized tetragonal zirconia films based on evaporation of the oxide powders using an electron beam. Both alumina (Al2O3) and scandia (Sc2O3) are used as stabilizing agents. The relative amounts of Al and Sc were gradually increased to find the minimum amount necessary to stabilize the tetragonal phase of zirconia. In the as-deposited state, all films were amorphous, but crystallized following postdeposition heat treatments. As the atomic percent of Al and Sc was increased, the tetragonal phase of zirconia was stabilized. It appeared as a single phase for compositions with more than 24 at. % Al and more than 5 at. % Sc.