Issues in HgCdTe Research and Expected Progress in Infrared Detector Fabrication

APDS 光电二极管 探测器 可操作性 雪崩光电二极管 光电子学 钝化 制作 材料科学 红外线的 二极管 碲化镉汞 光学 物理 计算机科学 纳米技术 图层(电子) 医学 替代医学 软件工程 病理
作者
O. Gravrand,G. Destéfanis,Sylvette Bisotto,N. Baier,J. Rothman,L. Mollard,D. Brellier,Laurent Rubaldo,A. Kerlain,V. Destefanis,Michel Vuillermet
出处
期刊:Journal of Electronic Materials [Springer Science+Business Media]
卷期号:42 (11): 3349-3358 被引量:34
标识
DOI:10.1007/s11664-013-2803-9
摘要

The purpose of this paper is to review the trends in HgCdTe research, illustrating the discussed ideas with the latest results obtained at DEFIR (CEA-LETI and Sofradir joint laboratory). The beginning of this paper is devoted to an extended introduction to today’s issues concerning HgCdTe photodiode performance enhancement. In fact, very high-quality material is mandatory for ultrahigh performance at low temperature as well as for high noise operability at high operating temperature (HOT). Therefore, a strong effort has been carried out during the last few years for lattice-matched CdZnTe substrate and HgCdTe active layer growth improvement, leading to very large substrates and ultraflat liquid-phase epitaxy layers. The same analysis holds for diode process quality and passivation. Therefore, the photodiode process has been completely revisited in order to optimize HOT operability. Also necessary for the next generation of HOT devices, some significant progress has been made in small-pixel-pitch interconnection on silicon read-out circuits. Indeed, the first 10-μm focal-plane arrays (FPAs) have been successfully fabricated this year in the mid-wave infrared (IR) band. The latest avalanche photodiode (APD) realizations are also presented with 15-μm-pitch FPAs for passive imaging and 30-μm-pitch ultrafast arrays running at 1.5 kHz full frame rate. Linear-mode photon counting using APDs is also briefly discussed. Finally, the paper concludes on more complex structures for the third generation of IR detectors, discussing the latest achievements in dual-band FPA fabrication in various spectral bands.
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