Measuring Elastic Properties of the Constituent Multilayer Coatings for Different Modulation Periods

This paper is developed to characterize mechanical properties of multilayer coatings for different modulation periods. To that end, Dimensional Analysis Method (DAM) and Finite Element Method (FEM) are applied. Based on these methodologies, two dimensionless forms for the new model are expressed. Numerical nanoindentation tests are carried out for different set properties of multilayer coatings in order to validate the proposed model. Therefore, the mechanical properties of multilayer thin films are identified according to the reverse analysis algorithm. Hence, the input and the identified properties are consistent which ensure the effectiveness and the reliability of the proposed model. Moreover, a case study of Ti-TiN multilayer coating deposited on Zr-based metallic glasses was considered. As a result, the new model is useful for multilayer coatings for different modulation periods and can be used for technological applications.