微加工
薄脆饼
材料科学
电压
夹紧
阴极射线
梁(结构)
光电子学
电子
光学
电气工程
机械工程
制作
物理
工程类
病理
医学
量子力学
替代医学
摘要
Vacuum wafer chucks are useless for electron beam microfabrication. An analysis of the required electrostatic forces and frequency response of a specimen wafer on a field plate is made. An experimental electrostatic chuck and its high voltage square wave power supply have been fabricated. Full clamping action has been provided by electrostatic pressures of 1/6 atm, and 1 atm pressures are feasible. In-vacuum operation is excellent down to supply frequencies of 0.01Hz.
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