材料科学
纳米压痕
溅射沉积
扫描电子显微镜
退火(玻璃)
氩
分析化学(期刊)
涂层
溅射
X射线光电子能谱
光谱学
氧化物
能量色散X射线光谱学
辉光放电
复合材料
腔磁控管
薄膜
冶金
化学工程
纳米技术
等离子体
化学
有机化学
色谱法
工程类
物理
量子力学
作者
Ph. V. Kiryukhantsev-Korneev,А. Д. Сытченко,Yuriy Pogozhev,S. Vorotilo,Anton S. Orekhov,П.А. Логинов,Е. А. Левашов
出处
期刊:Materials
[MDPI AG]
日期:2021-04-13
卷期号:14 (8): 1932-1932
被引量:10
摘要
Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000–1500 °C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 °C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.
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