Magnetron sputtering deposition and selenization of Sb2Se3 thin film for substrate Sb2Se3/CdS solar cells

Antimony triselenide (Sb2Se3) thin film was fabricated as the absorber layer in photovoltaic solar cell using magnetron sputtering deposition method. An additional selenization process was applied to increase the crystallinity of the film as well as to compensate for selenium loss during the sputtering process. Various analytical techniques were used to characterize the morphology and composition of the film. It was found that the annealing temperature is the key factor for thin film quality and the sample annealed at 350 °C shows the optimum result with a power conversion efficiency of 2.1%.