Data System for AlN Single Crystal Growth

Aluminum nitride (AlN) is a typical representative of the third generation semiconductor materials. To increase the efficiency of managing experimental data for AlN single crystal growth, this paper purposes a multitasking system based on browser/server (B/S) architecture. The system uses serial communication, LAN communication, relational database system, B/S software architecture and other technologies to achieve data collection, data storing, data retrieval, data analysis and user access. Through statistical analysis of experimental data and results, the system assists researchers to find the key factors (e.g. temperature gradient and supersaturation pressure) of AlN single crystal growth. As a result, the system helps to grow large size AlN single crystals.