Development of ferroelectricity with crystallographic phase transformation in Hf0.5Zr0.5O2 thin films upon initial stimulation of an electric field exceeding the coercive field

Abstract This study demonstrates a drastic transformation of ferroelectricity and crystallographic phase in Hf 0.5 Zr 0.5 O 2 (HZO) thin films through the first stimulation of an electric field larger than the coercive field in metal-ferroelectric-metal (MFM) capacitors. Initially, capacitance–voltage ( C – V ) measurements in fresh MFM capacitors with voltage sweep smaller than the coercive field indicated constant capacitance value without hysteresis. Applying the electric field exceeding the coercive field subsequently, the C – V behavior changed to a typical dual-peak ferroelectric feature in positive and negative sweeps. X-ray diffraction analysis of the HZO layers before and after a single electric-field application revealed small-angle shifts in diffraction peaks, confirming a crystallographic phase transformation induced by the single electric-field stimulation exceeding the coercive field. These results suggest a possibility that the first electric field apply initiates development of ferroelectric phase transformation from a non-ferroelectric phase.