Silicon nanoparticles: fabrication, characterization, application and perspectives

Abstract Silicon nanoparticles have emerged as pivotal components in nanoscience and nanoengineering due to their inherent characteristics such as high energy capacity and outstanding optical properties. Numerous fabrication and characterization techniques have been researched so far, while a range of applications utilizing them have been developed. In this review, we aim to provide a brief overview of the distinct and representative fabrication methods of silicon nanoparticles, including top-down, bottom-up, and reduction approaches. Then, we look into various characterization techniques essential for assessing and ensuring quality and performance of fabricated silicon nanoparticles. In addition, we provide insights for silicon nanoparticle technology towards further advancements.