Monolithic 3D Integration of Dendritic Neural Network with Memristive Synapse, Dendrite and Soma on Si CMOS

We report a monolithic three-dimensional integration of dendritic neural network (M3D-DNN) with memristors-based artificial synapse, dendrite and soma on top of Si-based CMOS logic. The Si CMOS layer served as control logic fabricated in foundry. A 1k-bit artificial synaptic array was built with HfO $_{2} -$based nonvolatile memristors to implement computing-in-memory (CIM). In addition, TiO $_{x} -$based memristive artificial dendrite and NbO $_{x} \mathrm{N}_{y} -$based memristive artificial soma were adopted to implement the dendritic neuron (DN) layer to process postsynaptic signals. Both the CIM and DN layers were fabricated using a BEOL-compatible process. The structural integrity and proper function of each layer in the M3D-DNN were verified. Our work demonstrates a promising architecture to efficiently implement bio-plausible artificial neural networks (ANNs).