Lv31
356 积分 2023-02-23 加入
Fast-filling of 4H-SiC trenches at 10 μm/h by enhancing partial pressures of source species in chemical vapor deposition processes
5小时前
已完结
Optimization of deposition uniformity during silicon epitaxy in deep trenches
1天前
已完结
Epitaxial Deposition of Silicon in Deep Grooves
1天前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
1天前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
2天前
已完结
4H-SiC trench filling by chemical vapor deposition using trichlorosilane as Si-species precursor
3天前
已完结
Etching and Chemical Control of the Silicon Nitride Surface
8天前
已完结
Thick selective epitaxial growth of silicon at 960°C using silane only
23天前
已完结
Study of the poly/epi kinetic ratio in SiH4 based chemistry for new CMOS architectures
23天前
已完结
High-speed epitaxial growth of silicon from silane at reduced pressure
1个月前
已关闭
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