Lv3
376 积分 2023-02-23 加入
Thick selective epitaxial growth of silicon at 960°C using silane only
10个月前
已完结
Kinetics of Lateral Autodoping in Silicon Epitaxy
11个月前
已完结
Numerical modeling study on the epitaxial growth of silicon from dichlorosilane
11个月前
已完结
Fast-filling of 4H-SiC trenches at 10 μm/h by enhancing partial pressures of source species in chemical vapor deposition processes
11个月前
已完结
Optimization of deposition uniformity during silicon epitaxy in deep trenches
11个月前
已完结
Epitaxial Deposition of Silicon in Deep Grooves
11个月前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
11个月前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
11个月前
已完结
4H-SiC trench filling by chemical vapor deposition using trichlorosilane as Si-species precursor
1年前
已完结
Etching and Chemical Control of the Silicon Nitride Surface
1年前
已完结
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