Lv3
376 积分 2023-02-23 加入
Thick selective epitaxial growth of silicon at 960°C using silane only
7个月前
已完结
Kinetics of Lateral Autodoping in Silicon Epitaxy
7个月前
已完结
Numerical modeling study on the epitaxial growth of silicon from dichlorosilane
8个月前
已完结
Fast-filling of 4H-SiC trenches at 10 μm/h by enhancing partial pressures of source species in chemical vapor deposition processes
8个月前
已完结
Optimization of deposition uniformity during silicon epitaxy in deep trenches
8个月前
已完结
Epitaxial Deposition of Silicon in Deep Grooves
8个月前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
8个月前
已完结
Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon
8个月前
已完结
4H-SiC trench filling by chemical vapor deposition using trichlorosilane as Si-species precursor
8个月前
已完结
Etching and Chemical Control of the Silicon Nitride Surface
8个月前
已完结
皖公网安备34019202002308
