| 标题 |
High-speed epitaxial growth of silicon from silane at reduced pressure 硅烷减压高速外延生长硅
|
| 网址 | |
| DOI |
10.1016/S0022-0248(01)01356-0
doi
|
| 其它 | ournal of Crystal Growth (2001), 226(1), 1-8 |
| 求助人 | |
| 下载 |
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(2025-6-4)