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Optimizing Electrostatic Chuck Performance through ZrO₂/Al₂O₃ ratio and Doping Components (SiO₂ and Y₂O₃)
1小时前
已完结
Additive Manufacturing of Electrostatic Chucks with Tunable Ceramic-Polymer Dielectrics: A Combined Experimental and FEA Approach
1小时前
求助中
Yttrium-doped aluminum nitride ceramics for dielectric layers in Johnsen-Rahbek (J-R) type electrostatic chucks
1小时前
已完结