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50 积分 2024-03-11 加入
A low temperature electroless nickel plating chemistry
2个月前
已完结
Electroless Nickel Plating – A Review
2个月前
已完结
High-temperature electrostatic chuck enabled by BN dielectrics
2个月前
已完结
Mechanisms underlying temperature uniformity in electrostatic chucks through experimental and simulation methods
2个月前
已完结
Enhanced temperature uniformity of electrostatic chuck: ceramic surface contact ratio and backside gas pressure
2个月前
已完结
Polymeric wafer contact surface integrity and uniformity of electrostatic chuck: Characterization and potential impact on ion implant process
2个月前
已完结
Optimizing Electrostatic Chuck Performance through ZrO₂/Al₂O₃ ratio and Doping Components (SiO₂ and Y₂O₃)
2个月前
已完结
Additive Manufacturing of Electrostatic Chucks with Tunable Ceramic-Polymer Dielectrics: A Combined Experimental and FEA Approach
2个月前
已完结
Yttrium-doped aluminum nitride ceramics for dielectric layers in Johnsen-Rahbek (J-R) type electrostatic chucks
2个月前
已完结
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