| 标题 |
Additive Manufacturing of Electrostatic Chucks with Tunable Ceramic-Polymer Dielectrics: A Combined Experimental and FEA Approach |
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| DOI | |
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期刊:Composites Communications 作者:Munseong Kim; Jongwoo Lim; Jae-Hyuk Park; Sukeun Yoon; Jihoon Kim 出版日期:2026-01-01 |
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(2025-6-4)