Lv1
90 积分 2026-03-03 加入
Improved properties of atomic layer deposited ruthenium via postdeposition annealing
8天前
已完结
Enhanced nucleation mechanism in ruthenium atomic layer deposition: Exploring surface termination and precursor ligand effects with RuCpEt(CO)2
1个月前
已完结
Low-Temperature Ru–Ru Hybrid Bonding: Ar/H 2 Plasma and NH 4 OH Synergistic Activation for Ultrahigh Density Interconnection
1个月前
已完结
Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection
1个月前
已完结
Atomic layer deposition
1个月前
已关闭
Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films
3个月前
已完结
Robust Overlay Control in 2-Level Semi-Damascene
3个月前
已完结
MP16/18 Integration in Ru Semi-Damascene using SiN-Based Core for Spacer-is-Dielectric SADP
3个月前
已完结
A novel integration scheme for self-aligend Ru topvia as post-Cu alternative metal interconnects
3个月前
已完结
Growth behavior and mechanism of atomic layer deposition of Ru for replacing Cu-interconnects
3个月前
已完结
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