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The effect of the built-in stress level of AlN layers on the properties of piezoelectric vibration energy harvesters
4个月前
已完结
Fabrication and application of flexible AlN piezoelectric film
6个月前
已完结
Study on optimizing c-axis oriented AlN thin film for piezoelectric sensing applications controlling the sputtering process parameters
6个月前
已完结
Thermal annealing of AlN films for piezoelectric applications
6个月前
已完结
Piezoelectric Sensors Operating at Very High Temperatures and in Extreme Environments Made of Flexible Ultrawide‐Bandgap Single‐Crystalline AlN Thin Films
6个月前
已完结
Structure and properties of piezoelectric aluminum nitride thin films deposited by radio-frequency magnetron sputtering for surface acoustic wave applications
6个月前
已关闭
Fabrication and characterization of high-temperature AlN thick-film piezoelectric accelerometer
6个月前
已完结
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