Lv2
108 积分 2024-08-12 加入
Optimization of ion energy distribution and ion angular distribution by tuning chamber radius in inductively coupled plasma etching
1个月前
已关闭
The 2022 Plasma Roadmap: low temperature plasma science and technology
1个月前
已完结
Atomic layer etching of silicon in Br2-containing plasmas
2个月前
已完结
An Overview on Time‐Resolved Optical Analysis of HiPIMS Discharge
2个月前
已完结
Experimental measurement of E to H mode transition in O2, N2 and O2-N2 gases in cylindrical ICP source for photoresist dry-strip applications
2个月前
已关闭
E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas
2个月前
已完结
Investigation on the spatial distribution of H− ions in RF ICP source with Faraday shield
3个月前
已完结
Investigation on the spatial distribution of H− ions in RF ICP source with Faraday shield
3个月前
已完结
Free-Radical-Induced Grafting from Plasma Polymer Surfaces
3个月前
已完结
A generalized external circuit model for electrostatic particle-in-cell simulations
4个月前
已完结
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