Lv6
2330 积分 2025-02-09 加入
Cerium(IV) oxide addition to yttrium oxide thin films for enhanced etch resistance in fluorine-based plasma
3天前
已完结
Oxygen plasma-assisted magnetron sputtering deposition of non-stoichiometric Y2O3 films: Influence of oxygen vacancies on etching resistance
3天前
已完结
Reducing CFx residue from Etching Process by Optimizing Post Plamsa Treatment
1个月前
已完结
Investigation of contamination particles generation and surface chemical reactions on Al2O3, Y2O3, and YF3 coatings in F-based plasma
1个月前
已完结
Halogen Corrosion of Metals
2个月前
已完结
A comprehensive review on corrosion mechanisms and protection strategies of metallic materials in fluorine atmospheres
2个月前
已完结
Recent advances in plasma etching for micro and nano fabrication of silicon-based materials: a review
3个月前
已完结
Effect of coating density on plasma etch resistance and material loss of Y2O3 coatings
3个月前
已完结
Effect of bias power on the etching of aluminum alloys in inductively coupled HBr/Cl2/N2/O2 plasma
4个月前
已完结
A review: Fabrication techniques of the Hastelloy (super alloy) composites and it impacts on the properties
4个月前
已完结
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