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10 积分 2025-12-10 加入
Model analysis of the feature profile evolution during Si etching in HBr-containing plasmas
20天前
已完结
Neutral transport during etching of high aspect ratio features
20天前
已完结
Rf sputter etching—a universal etch
22天前
已完结
Plasma atomic layer etching of GaN/AlGaN materials and application: An overview
22天前
已完结
Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling
22天前
已完结
Deep silicon etching technology and applications: a review
22天前
已完结
Enabling High Aspect Ratio 3D NAND Scaling through Deposition and Etch Co-Optimization (DECO)
22天前
已关闭
Reactions of chlorine with Si(100) and Si(111): adsorption and desorption kinetics
1个月前
已完结
Reaction mechanisms for the photon-enhanced etching of semiconductors: An investigation of the UV-stimulated interaction of chlorine with Si(100)
1个月前
已完结
Kinetics of the reactions of intrinsic and phosphorus doped polycrystalline silicon with molecular chlorine
1个月前
已完结
Meta-Material Sensor-Based Internet of Things for Environmental Monitoring by Deep Learning: Design, Deployment, and Implementation
8个月前
已采纳
Determining Lennard-Jones Parameters Using Multiscale Target Data through Presampling-Enhanced, Surrogate-Assisted Global Optimization
8个月前
已采纳
Structural characteristics optimization and working performance test of dual-channel Venturi injector
8个月前
已驳回
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