| 标题 |
Neutral transport during etching of high aspect ratio features |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of vacuum science & technology 作者:Theodoros Panagopoulos; Thorsten Lill 出版日期:2023-04-11 |
| 求助人 | |
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(2025-6-4)