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106 积分 2026-05-25 加入
Study of heating effect in multi-beam mask writing
14天前
已关闭
MBM-4000: advanced features and applications
14天前
已完结
MBM-4000 multibeam mask writer enabling mask fabrication for a new era
14天前
已完结
Application field expansion of the multi-beam mask writer: MBM-4000 for high-NA EUV and MBM-2000C for mature node
14天前
已完结
Study on modeling of resist heating effect correction in multi-beam mask writers
14天前
已完结
Mask CD relationship to temperature at the time backscatter is received
14天前
已完结
Multi-beam mask writer MBM-3000 for next generation EUV mask production
14天前
已完结
Current performance and future plans on electron multi-beam mask writers toward high-NA EUV era
14天前
已完结
Electron multibeam mask writer for mature nodes: MBM-2000C
14天前
已完结
More nodes to be covered by multi-beam mask writers: MBM-2000C for mature nodes
14天前
已完结
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