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Etching characteristics and mechanism of Pb(Zr,Ti)O3 thin films in CF4/Ar inductively coupled plasma
1年前
已完结
A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers
1年前
已完结
An efficient and noticeable wet etching method for PZT and its application in scanning mirrors
1年前
已完结
Deep plasma etching of piezoelectric PZT with SF6
1年前
已完结
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