Lv11
50 积分 2025-09-29 加入
Analysis of Focus Ring Effect on Ion Angle Distribution in a Pulsed RF Capacitively Coupled Plasma Using a Two-Dimensional Particle-in-Cell Simulation
2天前
已完结
Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO2 surfaces
5天前
已完结
Electron-impact fragmentation dynamics of carbonyl sulfide: A combined experimental and theoretical study
1个月前
已完结
Kinetics and mechanism of the decomposition of CS2, OCS, and SCl2 in a radiofrequency pulse discharge
1个月前
已关闭
Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO2 surfaces
1个月前
已完结
Deep cryogenic silicon etching for 3D integrated capacitors: A numerical perspective
1个月前
已完结
CDSAXS study of 3D NAND channel hole etch pattern edge effects and etched hole pattern variance
1个月前
已完结
Simulation of plasma-activated oxygen radical etching based on Penning ionization
1个月前
已完结
Wafer edge overlay control solution for N7 and beyond
1个月前
已完结
Performance evaluation of GaN etching using Cl2-based plasma with bias pulsing
1个月前
已关闭
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