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Plasma-Enhanced Atomic Layer Deposition of TiN Thin Films Using Ultralow Electron Temperature Plasma
15小时前
待确认
Deposition of TiN and HfO2 in a commercial 200mm remote plasma atomic layer deposition reactor
10天前
已完结
Insight into the removal and reapplication of small inhibitor molecules during area-selective atomic layer deposition of SiO2
10天前
已完结
A Review of Microwave Plasma Sources in Atomic Emission Spectrometry: Literature from 1985 to the Present
1个月前
已完结
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
1个月前
已完结
Phase-Pure ε-Ga2O3 Thin Films on c-Plane Sapphire Substrates at Low Temperature by Plasma-Enhanced ALD: Growth, Characterization, and Interface Analysis
1个月前
已完结
Phase-Pure ε-Ga2O3 Thin Films on c-Plane Sapphire Substrates at Low Temperature by Plasma-Enhanced ALD: Growth, Characterization, and Interface Analysis
1个月前
已完结
Non-destructive identification of cashmere and wool fibers based on PLS-DA and LDA using NIR spectroscopy
1个月前
已关闭
Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
2个月前
已完结
Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper
3个月前
已完结
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